Invention Grant
- Patent Title: Method and device for characterizing the surface shape of an optical element
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Application No.: US17151017Application Date: 2021-01-15
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Publication No.: US11326872B2Publication Date: 2022-05-10
- Inventor: Steffen Siegler , Thomas Schicketanz
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102018211853.1 20180717
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01B9/02001 ; G01M11/00 ; G03F7/20 ; G01B9/02

Abstract:
A method and a device for characterizing the surface shape of an optical element. In the method, in at least one interferogram measurement carried out by an interferometric test arrangement, a test wave reflected at the optical element is caused to be superimposed with a reference wave not reflected at the optical element. In this case, the figure of the optical element is determined on the basis of at least two interferogram measurements using electromagnetic radiation having in each case linear input polarization or in each case circular input polarization, wherein the input polarizations for the two interferogram measurements differ from one another.
Public/Granted literature
- US20210140762A1 METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICAL ELEMENT Public/Granted day:2021-05-13
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