Invention Grant
- Patent Title: Vibrator device, electronic apparatus, and vehicle
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Application No.: US16941655Application Date: 2020-07-29
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Publication No.: US11326882B2Publication Date: 2022-05-10
- Inventor: Seiichiro Ogura , Keiichi Yamaguchi , Ryuta Nishizawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-139663 20190730
- Main IPC: G01C19/5642
- IPC: G01C19/5642 ; B60R16/023 ; G01C19/5656 ; G01P15/18 ; G01C19/5607 ; G01C19/56

Abstract:
A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.
Public/Granted literature
- US20210033395A1 VIBRATOR DEVICE, ELECTRONIC APPARATUS, AND VEHICLE Public/Granted day:2021-02-04
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