Scale used in an electromagnetic inductive encoder or a magnetic encoder
Abstract:
A scale capable of maintaining measurement accuracy even if the pattern of the scale pattern is scratched is provided. The scale 2 comprises a scale pattern 4 having a plurality of unit patterns provided at a predetermined pitch along the measurement direction on a surface thereof. At least one of the plurality of unit patterns comprises a plurality of loop portions 8 formed with conductors in a loop shape. The plurality of loop portions 8 included in the unit pattern are arranged so as to be spaced from each other such that the centers of gravity of the loop portions 8 are at the same position in the measurement direction on the surface of the scale 2. Thereby, the plurality of loop portions 8 included in the unit pattern can prevent deviation of the center of gravity of the magnetic flux distribution in the measurement direction, even if any of the plurality of the loop portions 8 is scratched. Therefore, the scale 2 can maintain the measurement accuracy.
Public/Granted literature
Information query
Patent Agency Ranking
0/0