Invention Grant
- Patent Title: Monolithically integrated microscale pressure sensor on an optical fiber tip
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Application No.: US17229986Application Date: 2021-04-14
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Publication No.: US11326970B2Publication Date: 2022-05-10
- Inventor: Jeremiah C Williams , Hengky Chandrahalim
- Applicant: Jeremiah C Williams , Hengky Chandrahalim
- Applicant Address: US OH Dayton; US OH Beavercreek
- Assignee: Jeremiah C Williams,Hengky Chandrahalim
- Current Assignee: Jeremiah C Williams,Hengky Chandrahalim
- Current Assignee Address: US OH Dayton; US OH Beavercreek
- Agency: AFMCLO/JAZ
- Agent David E. Franklin
- Main IPC: G01L11/02
- IPC: G01L11/02 ; G02B6/293

Abstract:
A passive microscopic Fabry-Pérot Interferometer (FPI) pressure sensor includes an optical fiber and a three-dimensional microscopic optical enclosure. The three-dimensional microscopic optical enclosure includes tubular side walls having lateral pleated corrugations and attached to a cleaved tip of the optical fiber to receive a light signal. An optically reflecting end wall is distally engaged to the tubular side walls to enclose a trapped quantity of gas that longitudinally positions the optically reflecting end wall in relation to ambient air pressure, changing a distance traveled by a light signal reflected back through the optical fiber.
Public/Granted literature
- US20210325270A1 Monolithically integrated microscale pressure sensor on an optical fiber tip Public/Granted day:2021-10-21
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