Invention Grant
- Patent Title: Stacked semiconductor device and test method thereof
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Application No.: US16432284Application Date: 2019-06-05
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Publication No.: US11327109B2Publication Date: 2022-05-10
- Inventor: Young-Mok Jeong
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2018-0140555 20181115
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L25/065 ; H01L25/18

Abstract:
A stacked semiconductor device includes: a plurality of semiconductor chips that are stacked in a vertical direction, wherein each of the semiconductor chips includes: a plurality of first through-electrodes; a plurality of second through-electrodes positioned adjacent to the first through-electrodes; a first voltage driving circuit suitable for providing the first through-electrodes with a test voltage or a ground voltage based on a first driving control signal; a second voltage driving circuit suitable for providing the second through-electrodes with the test voltage or the ground voltage based on a second driving control signal; and a failure detection circuit suitable for generating a failure signal based on a plurality of first detection signals received through the first through-electrodes and a plurality of second detection signals received through the second through-electrodes.
Public/Granted literature
- US20200158776A1 STACKED SEMICONDUCTOR DEVICE AND TEST METHOD THEREOF Public/Granted day:2020-05-21
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