Invention Grant
- Patent Title: Semiconductor device for detecting characteristics of semiconductor element and operating method thereof
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Application No.: US17146892Application Date: 2021-01-12
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Publication No.: US11327112B2Publication Date: 2022-05-10
- Inventor: Yun Seok Hong
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2020-0103298 20200818
- Main IPC: G01R31/28
- IPC: G01R31/28 ; H01L27/092 ; H01L21/66

Abstract:
According to an embodiment, a semiconductor device comprises a first monitoring pad and a second monitoring pad; a test circuit including an NMOS transistor having a drain and source coupled between a first voltage terminal and a common node, a PMOS transistor having a drain and source coupled between the common node and a second voltage terminal, a first switching element having a first terminal coupled to the common node via a first resistor and a second terminal coupled to the first monitoring pad, and a second switching element having a third terminal coupled to the common node via a second resistor and a fourth terminal coupled to the second monitoring pad; and a test control circuit suitable for controlling the test circuit.
Public/Granted literature
- US20220057447A1 SEMICONDUCTOR DEVICE FOR DETECTING CHARACTERISTICS OF SEMICONDUCTOR ELEMENT AND OPERATING METHOD THEREOF Public/Granted day:2022-02-24
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