Invention Grant
- Patent Title: MEMS actuation system
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Application No.: US16256495Application Date: 2019-01-24
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Publication No.: US11327276B2Publication Date: 2022-05-10
- Inventor: Guiqin Wang , Xiaolei Liu , Matthew Ng
- Applicant: MEMS Drive (Nanjing) Co., Ltd.
- Applicant Address: CN Nanjing
- Assignee: MEMS Drive (Nanjing) Co., Ltd.
- Current Assignee: MEMS Drive (Nanjing) Co., Ltd.
- Current Assignee Address: CN Nanjing
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: G02B13/00
- IPC: G02B13/00 ; G02B7/09 ; G03B17/00 ; H01L41/09 ; G03B13/32 ; H02N1/00 ; H02N2/02
Abstract:
A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.
Public/Granted literature
- US20190227266A1 MEMS Actuation System Public/Granted day:2019-07-25
Information query
