Invention Grant
- Patent Title: Systems and methods for curing an imprinted field
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Application No.: US16661281Application Date: 2019-10-23
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Publication No.: US11327409B2Publication Date: 2022-05-10
- Inventor: Nilabh K. Roy , Anshuman Cherala
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agent Daniel Ratoff
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
Methods and systems that include the generation of a map of modulation values for a spatial light modulator. In which a map representative of a desired curing region is received. Receiving, for each pixel of a spatial light modulator, spatial information representative of an intensity distribution of actinic radiation at a plane of formable material under a template that is guided from the spatial light modulator to the plane of the formable material for curing the formable material under the template. Receiving a dose threshold for the formable material. Generating a map of modulation values for each pixel in the spatial light modulator based on: the dose threshold; the spatial information for all of the pixels; and the map representative of the desired curing region.
Public/Granted literature
- US20210124274A1 Systems and Methods for Curing an Imprinted Field Public/Granted day:2021-04-29
Information query
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