A touch substrate, a manufacturing and driving method thereof and a touch display device are provided. The touch substrate includes: a base substrate and a force sensor being located on the base substrate and including at least one force sensing unit, the force sensing unit including a plurality of extension parts and at least one connection part, the plurality of extension parts extending along a first direction X, the plurality of extension parts being sequentially connected by the at least one connection part. The touch substrate can increase the change in resistance caused by the touch force so as to facilitate detection of the change in touch force by the detection chip.