Ultrasonic transducer with perforated baseplate
Abstract:
An ultrasonic transducer including a membrane film and a perforated baseplate. The baseplate can have a conductive surface with a plurality of perforations formed through the baseplate. The membrane film can have a conductive surface and be positioned under tension proximate to the perforations formed through the baseplate. The tension of the membrane film can be controlled to provide a restoring force to counteract the moving mass of the membrane film, and the moving mass of air in the perforations of the baseplate. By selecting the diameter(s) of the perforations of the baseplate, the thickness of the baseplate, the thickness of the membrane film, the tension of the membrane film, and/or the bending stiffness of the membrane film, a wide bandpass frequency response of the ultrasonic transducer centered at an ultrasonic frequency of interest can be obtained and tailored to a desired application.
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