Invention Grant
- Patent Title: Charged particle beam device
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Application No.: US16986369Application Date: 2020-08-06
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Publication No.: US11328897B2Publication Date: 2022-05-10
- Inventor: Minami Shouji , Natsuki Tsuno , Yasuhiro Shirasaki , Muneyuki Fukuda , Satoshi Takada
- Applicant: Hitachi High-Tech Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Tech Corporation
- Current Assignee: Hitachi High-Tech Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge, P.C.
- Priority: JPJP2019-158941 20190830
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/26 ; G01N23/2251 ; G01N27/04 ; G01N27/22 ; G01B15/02 ; G01N23/2206
Abstract:
A charged particle beam device according to the present invention changes a signal amount of emitted charged particles by irradiating the sample with light due to irradiation under a plurality of light irradiation conditions, and determines at least any one of a material of the sample or a shape of the sample according to the changed signal amount.
Public/Granted literature
- US20210066029A1 CHARGED PARTICLE BEAM DEVICE Public/Granted day:2021-03-04
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