Invention Grant
- Patent Title: Oxide sintered body and sputtering target
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Application No.: US16310388Application Date: 2017-06-16
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Publication No.: US11328911B2Publication Date: 2022-05-10
- Inventor: Kazuyoshi Inoue , Shigekazu Tomai , Masatoshi Shibata , Motohiro Takeshima
- Applicant: IDEMITSU KOSAN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: IDEMITSU KOSAN CO., LTD.
- Current Assignee: IDEMITSU KOSAN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JPJP2016-121063 20160617
- International Application: PCT/JP2017/022276 WO 20170616
- International Announcement: WO2017/217529 WO 20171221
- Main IPC: H01J37/34
- IPC: H01J37/34 ; C23C14/34 ; C23C14/08 ; C04B35/01 ; C04B35/64 ; H01L29/66
Abstract:
An oxide sintered body includes a bixbyite phase represented by In2O3, and a garnet phase represented by Y3In2Ga3O12.
Public/Granted literature
- US20190218145A1 OXIDE SINTERED BODY AND SPUTTERING TARGET Public/Granted day:2019-07-18
Information query
