Invention Grant
- Patent Title: Excimer lamp
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Application No.: US17257268Application Date: 2019-06-26
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Publication No.: US11328923B2Publication Date: 2022-05-10
- Inventor: Shigeki Fujisawa , Kazuyuki Mori
- Applicant: Ushio Denki Kabushiki Kaisha
- Applicant Address: JP Tokyo
- Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JPJP2018-129309 20180706
- International Application: PCT/JP2019/025322 WO 20190626
- International Announcement: WO2020/008971 WO 20200109
- Main IPC: H01J61/067
- IPC: H01J61/067 ; H01J65/00 ; H01J61/12 ; H01J61/30 ; H01J61/33 ; H01J61/36

Abstract:
In the excimer lamp according to the present invention, a flat discharge vessel having a substantially rectangular cross-sectional shape and comprising a pair of planar parts and a pair of side-surface parts has a pair of external electrodes disposed on the respective outer surfaces of the planar parts. The end parts of the external electrodes are provided with an auxiliary electrode extending to a region that is made smaller than the distance between the planar parts. A lead that supplies electricity to the external electrode is connected to the auxiliary electrode in the region that is made smaller than the distance between the planar parts.
Public/Granted literature
- US20210272792A1 EXCIMER LAMP Public/Granted day:2021-09-02
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