Invention Grant
- Patent Title: Semiconductor wafer and method for manufacturing semiconductor wafer thereof
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Application No.: US16826160Application Date: 2020-03-20
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Publication No.: US11328924B2Publication Date: 2022-05-10
- Inventor: Kaixuan Chen , Zhiwei Lin , Liyan Huo , Xiangjing Zhuo , Gang Yao , Aimin Wang
- Applicant: Xiamen Changelight Co. Ltd.
- Applicant Address: CN Xiamen
- Assignee: Xiamen Changelight Co. Ltd.
- Current Assignee: Xiamen Changelight Co. Ltd.
- Current Assignee Address: CN Xiamen
- Agency: Arch & Lake LLP
- Priority: CN201710919143.6 20170930,CN201910516550.1 20190614
- Main IPC: H01L33/12
- IPC: H01L33/12 ; H01L21/02 ; H01L21/3213 ; H01L21/28

Abstract:
Provided is a method for manufacturing a semiconductor wafer and a semiconductor wafer. The method includes: disposing a sacrificial layer on a first surface and a second surface of a patterned substrate, the patterned substrate comprising the first surface and the second surface having different normal directions; exposing the first surface by removing the first portion of the sacrificial layer disposed on the first surface; growing an original nitride buffer layer on the first surface and the second portion of the sacrificial layer; partially lifting off the second portion of the sacrificial layer disposed on the second surface such that at least one sub-portion of the second portion of the sacrificial layer remains on the second surface of the patterned substrate; and growing an epitaxial layer on the original nitride buffer layer, where a crystal surface of the epitaxial layer grows along a normal direction of the patterned substrate.
Public/Granted literature
- US20200219715A1 SEMICONDUCTOR WAFER AND METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER THEREOF Public/Granted day:2020-07-09
Information query
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