Invention Grant
- Patent Title: Substrate processing apparatus and methods with factory interface chamber filter purge
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Application No.: US17008075Application Date: 2020-08-31
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Publication No.: US11328938B2Publication Date: 2022-05-10
- Inventor: Michael R. Rice
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B01D46/70
- IPC: B01D46/70 ; H01L21/67 ; H01L21/673 ; H01L21/677
Abstract:
A system includes a filter purge apparatus configured to supply a flushing gas to a portion of a factory interface chamber located upstream of a chamber filter to minimize moisture contamination of the chamber filter by ambient air. The filter purge apparatus is configured to supply the flushing gas in association with breach of the factory interface chamber which compromises controlled environment of the factory interface chamber.
Information query
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