Invention Grant
- Patent Title: Prescriptive analytics in highly collinear response space
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Application No.: US16599962Application Date: 2019-10-11
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Publication No.: US11328964B2Publication Date: 2022-05-10
- Inventor: Sidharth Bhatia , Jie Feng , Dermot Cantwell
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G05B13/02
- IPC: G05B13/02 ; H01L21/66 ; G06Q50/04 ; H01L21/67 ; G06N3/08 ; H01L21/02 ; G11C11/16 ; H01J37/32 ; G01B7/06 ; G06T7/00 ; G01N21/41

Abstract:
Methods, systems, and non-transitory computer readable medium are described for prescriptive analytics in highly collinear response space. A method includes receiving film property data associated with manufacturing parameters of manufacturing equipment. The method further includes determining that the film property data is correlated and is different from target data. The method further includes selecting a set of data points of the film property data that are orthogonal to the target data. The method further includes performing feature extraction on the set of data points. The method further includes determining, based on the feature extraction, updates to one or more of the manufacturing parameters to meet the target data.
Public/Granted literature
- US3121545A Rotary deflector for aircraft engine intakes Public/Granted day:1964-02-18
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