Invention Grant
- Patent Title: Memory device and method of manufacturing the same
-
Application No.: US17075503Application Date: 2020-10-20
-
Publication No.: US11328981B2Publication Date: 2022-05-10
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2020-0064478 20200528
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L25/00 ; H01L25/065

Abstract:
The present disclosure includes a semiconductor device and a method of manufacturing the same. The semiconductor device includes a substrate including a first area and a second area, a vertical insulating film passing through the substrate between the first area of the substrate and the second area of the substrate, an interlayer insulating structure disposed on the substrate, and a conductive pad formed on the interlayer insulating structure and overlapping the first area of the substrate. The semiconductor device &so includes a through electrode passing through the conductive pad, the interlayer insulating structure, and the substrate in the first area.
Public/Granted literature
- US20210375720A1 MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2021-12-02
Information query
IPC分类: