Invention Grant
- Patent Title: Integrated circuit components with dummy structures
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Application No.: US16642851Application Date: 2017-09-27
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Publication No.: US11328992B2Publication Date: 2022-05-10
- Inventor: Kevin L. Lin , Nicholas James Harold McKubre , Richard Farrington Vreeland , Sansaptak Dasgupta
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Patent Capital Group
- International Application: PCT/US2017/053594 WO 20170927
- International Announcement: WO2019/066792 WO 20190404
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/532 ; H01L21/768

Abstract:
Disclosed herein are integrated circuit (IC) components with dummy structures, as well as related methods and devices. For example, in some embodiments, an IC component may include a dummy structure in a metallization stack. The dummy structure may include a dummy material having a higher Young's modulus than an interlayer dielectric of the metallization stack.
Public/Granted literature
- US20200350246A1 INTEGRATED CIRCUIT COMPONENTS WITH DUMMY STRUCTURES Public/Granted day:2020-11-05
Information query
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