Invention Grant
- Patent Title: Semiconductor device with improved device performance
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Application No.: US16823792Application Date: 2020-03-19
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Publication No.: US11329043B2Publication Date: 2022-05-10
- Inventor: Chih-Hao Wang , Min Cao , Shang-Wen Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L27/092 ; H01L29/78 ; H01L21/8238 ; H01L29/06

Abstract:
Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC includes a first fin projecting vertically from a semiconductor substrate. A second fin projects vertically from the semiconductor substrate, where the second fin is spaced from the first fin, and where the first fin has a first uppermost surface that is disposed over a second uppermost surface of the second fin. A nanostructure stack is disposed over the second fin and vertically spaced from the second fin, where the nanostructure stack comprises a plurality of vertically stacked semiconductor nanostructures. A pair of first source/drain regions is disposed on the first fin, where the first source/drain regions are disposed on opposite sides of an upper portion of the first fin. A pair of second source/drain regions is disposed on the second fin, where the second source/drain regions are disposed on opposite sides of the nanostructure stack.
Public/Granted literature
- US20210296318A1 SEMICONDUCTOR DEVICE WITH IMPROVED DEVICE PERFORMANCE Public/Granted day:2021-09-23
Information query
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