Invention Grant
- Patent Title: SRAM device and manufacturing method thereof
-
Application No.: US16931411Application Date: 2020-07-16
-
Publication No.: US11329056B2Publication Date: 2022-05-10
- Inventor: Shou-Zen Chang , Yi-Hsung Wei , Jia-You Lin , Pei-Hsiu Tseng , Chih-Peng Lee , Chi-Wei Lin
- Applicant: Powerchip Semiconductor Manufacturing Corporation
- Applicant Address: TW Hsinchu
- Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee: Powerchip Semiconductor Manufacturing Corporation
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW109113251 20200421
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/522 ; H01L23/528 ; H01L21/8234 ; H01L21/768 ; H01L49/02

Abstract:
A SRAM device includes a substrate, at least one two-transistor static random access memory (2T-SRAM), an inner dielectric layer, a plurality of contacts, an inter-layer dielectric (ILD) layer, a plurality of vias, and a conductive line. The 2T-SRAM is disposed on the substrate, the inner dielectric layer covers the 2T-SRAM, and the contacts are disposed in the inner dielectric layer and coupled to the 2T-SRAM. The ILD layer covers the inner dielectric layer and the contacts, and the vias are disposed in the ILD layer and respectively coupled to the 2T-SRAM trough the corresponding contacts. The conductive line is disposed on the ILD layer and connects with the plurality of vias, wherein the thickness of the conductive line is less than or equal to one-tenth of the thickness of the via such that it can significantly reduce the coupling effect compared with the traditional bit line.
Public/Granted literature
- US20210327884A1 SRAM DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2021-10-21
Information query
IPC分类: