Invention Grant
- Patent Title: Semiconductor devices having multi-channel active regions and methods of forming same
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Application No.: US17201494Application Date: 2021-03-15
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Publication No.: US11329066B2Publication Date: 2022-05-10
- Inventor: Munhyeon Kim , Soonmoon Jung , Daewon Ha
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2020-0097389 20200804
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/08 ; H01L21/84 ; H01L29/423 ; H01L29/10

Abstract:
A multi-channel semiconductor-on-insulator (SOI) transistor includes a substrate having an electrically insulating layer thereon and a semiconductor active layer on the electrically insulating layer. A vertical stack of spaced-apart insulated gate electrodes, which are buried within the semiconductor active layer, is also provided. This vertical stack includes a first insulated gate electrode extending adjacent the electrically insulating layer and an (N−1)th insulated gate electrode that is spaced from a surface of the semiconductor active layer, where N is a positive integer greater than two. An Nth insulated gate electrode is provided on the surface of the semiconductor active layer. A pair of source/drain regions are provided within the semiconductor active layer. These source/drain regions extend adjacent opposing sides of the vertical stack of spaced-apart insulated gate electrodes. In some of these aspects, the semiconductor active layer extends between the pair of source/drain regions and the electrically insulating layer, whereas the first insulated gate electrode contacts the electrically insulating layer.
Information query
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