Invention Grant
- Patent Title: Semiconductor device with a through electrode reception part wider than a through electrode, solid-state imaging device, and electronic equipment
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Application No.: US16496773Application Date: 2018-03-16
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Publication No.: US11329077B2Publication Date: 2022-05-10
- Inventor: Yoshiya Hagimoto
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Chip Law Group
- Priority: JPJP2017-072361 20170331
- International Application: PCT/JP2018/010394 WO 20180316
- International Announcement: WO2018/180576 WO 20181004
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/48 ; H01L25/065 ; H01L23/538 ; H01L21/768

Abstract:
The present technology relates to a semiconductor device, a solid-state imaging device, and electronic equipment, which are able to suppress increase of resistivity to a high level at a connection portion between an ESV and a wiring layer and to improve reliability of an electric connection using an ESV. The semiconductor device according to the present technology has a plurality of semiconductor substrates layered, and includes a through electrode penetrating a silicon layer of the semiconductor substrates, a wiring layer formed inside the semiconductor substrates, and a through electrode reception part. The through electrode reception part is connected to the wiring layer, in which the through electrode has a width smaller than the through electrode reception part, and the through electrode is electrically connected to the wiring layer via the through electrode reception part. The present technology is applicable, for example, to a CMOS image sensor.
Public/Granted literature
- US20210111204A1 SEMICONDUCTOR DEVICE, SOLID-STATE IMAGING DEVICE, AND ELECTRONIC EQUIPMENT Public/Granted day:2021-04-15
Information query
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