Semiconductor device with a through electrode reception part wider than a through electrode, solid-state imaging device, and electronic equipment
Abstract:
The present technology relates to a semiconductor device, a solid-state imaging device, and electronic equipment, which are able to suppress increase of resistivity to a high level at a connection portion between an ESV and a wiring layer and to improve reliability of an electric connection using an ESV. The semiconductor device according to the present technology has a plurality of semiconductor substrates layered, and includes a through electrode penetrating a silicon layer of the semiconductor substrates, a wiring layer formed inside the semiconductor substrates, and a through electrode reception part. The through electrode reception part is connected to the wiring layer, in which the through electrode has a width smaller than the through electrode reception part, and the through electrode is electrically connected to the wiring layer via the through electrode reception part. The present technology is applicable, for example, to a CMOS image sensor.
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