Invention Grant
- Patent Title: Sensing device
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Application No.: US16982031Application Date: 2019-03-25
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Publication No.: US11329210B2Publication Date: 2022-05-10
- Inventor: Yuki Yanagisawa , Hiroyuki Kukita
- Applicant: NIHON DEMPA KOGYO CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: NIHON DEMPA KOGYO CO., LTD.
- Current Assignee: NIHON DEMPA KOGYO CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JPJP2018-062542 20180328
- International Application: PCT/JP2019/012525 WO 20190325
- International Announcement: WO2019/188992 WO 20191003
- Main IPC: H01L35/32
- IPC: H01L35/32 ; H02N2/18 ; H03B5/32 ; G01N29/02

Abstract:
A sensing device is provided. The sensing device includes a heat regulation mechanism to regulate a temperature of a piezoelectric resonator corresponding to a voltage, and uses a sensing sensor to cause a sensing object to adsorb to and desorb from the piezoelectric resonator by increase and decrease of the temperature. A drive voltage is regulated to regulate an amplification factor of a heat regulation voltage input to a drive voltage regulator that regulates the temperature of the heat regulation mechanism corresponding to the type of a sensing sensor connected to a device main body. Therefore, when a CQCM sensor that heats a crystal resonator using a heater circuit and a TQCM sensor that regulates a heat of the crystal resonator sing a Peltier element are each used, regulation ranges of the driving powers supplied to the respective heater circuit and Peltier element can be changed.
Public/Granted literature
- US20210104655A1 SENSING DEVICE Public/Granted day:2021-04-08
Information query
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