Invention Grant
- Patent Title: Polishing device, polishing method, and non-transitory computer readable medium
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Application No.: US16447769Application Date: 2019-06-20
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Publication No.: US11331764B2Publication Date: 2022-05-17
- Inventor: Akira Nakamura
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JPJP2018-116849 20180620
- Main IPC: B24B37/005
- IPC: B24B37/005 ; H01L21/321 ; H01L21/3105 ; B24B37/04

Abstract:
A polishing device includes a polishing table comprising a polishing surface, a top ring configured to press a polishing target surface against the polishing surface and comprising a plurality of pressing portions configured to independently apply a pressing force to a plurality of areas of the wafer, and a controller configured to store a first pressing portion effect rate for a first pressing portion of the plurality of pressing portions in a storage unit, the first pressing portion effect rate being a change in polishing amount of the polishing target surface for a change in pressing force applied by the first pressing portion and control the pressing force applied by the first pressing portion based on the first pressing portion effect rate and a polishing profile of the polishing target surface.
Public/Granted literature
- US20190389029A1 POLISHING DEVICE, POLISHING METHOD, AND NON-TRANSITORY COMPUTER READABLE MEDIUM Public/Granted day:2019-12-26
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