Invention Grant
- Patent Title: Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods
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Application No.: US16265311Application Date: 2019-02-01
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Publication No.: US11331767B2Publication Date: 2022-05-17
- Inventor: James Bresson
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: B24B37/26
- IPC: B24B37/26 ; H01L21/306

Abstract:
A pad for chemical mechanical planarization comprises a material having a major surface, and asperities extending from the major surface, a ratio between a length and a width of each of the asperities greater than about 2:1, and an included angle between a leading surface of at least some asperities and the major surface greater than about 90°. Related pads, tools for chemical mechanical planarization, and related methods are also disclosed.
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