Invention Grant
- Patent Title: Holding devices for receiving a plurality of substrates for the treatment thereof, treatment systems, and treatment methods
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Application No.: US16405699Application Date: 2019-05-07
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Publication No.: US11332819B2Publication Date: 2022-05-17
- Inventor: Harald Liepack , Thomas Merz , Sebastian Wissel , Andreas Rack
- Applicant: Solayer GmbH
- Applicant Address: DE Kesselsdorf
- Assignee: Solayer GmbH
- Current Assignee: Solayer GmbH
- Current Assignee Address: DE Kesselsdorf
- Agency: Dascenzo Gates Intellectual Property Law, P.C.
- Priority: DE102018111247.5 20180509
- Main IPC: C23C14/50
- IPC: C23C14/50
Abstract:
Holding devices for receiving a plurality of substrates in a substrate treatment system are disclosed. Holding devices comprise a flange, at least one segment that is releasably disposed on the flange, and at least one carrier for receiving one or a plurality of substrates. The flange has connection faces for disposing the at least one segment on the flange. The at least one segment has a segment support structure. The at least one carrier is assembled on the segment support structure.
Information query
IPC分类:
