Invention Grant
- Patent Title: Cryopump
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Application No.: US16305730Application Date: 2018-03-07
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Publication No.: US11333139B2Publication Date: 2022-05-17
- Inventor: Jindong Liu , Qingwu Kong , Xiongfei Guo
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Applicant Address: CN Beijing; CN Inner Mongolia
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing; CN Inner Mongolia
- Agency: Armstrong Teasdale LLP
- Priority: CN201720798098.9 20170703
- International Application: PCT/CN2018/078256 WO 20180307
- International Announcement: WO2019/007093 WO 20190110
- Main IPC: F04B37/08
- IPC: F04B37/08

Abstract:
The embodiments of the present disclosure relates a cryopump including a pump housing including a suction port, a cold head located within the pump housing, a shielding element located within the pump housing and covering the cold head, a baffle at the suction port, the baffle including a gas passage with an inlet and an outlet, an orthographic projection of the baffle to the cross section of the pump housing completely covers an orthographic projection of the suction port thereto, the gas passage includes a first portion and a second portion intersecting with each other, the inlet is defined by one end of the first portion, the outlet is defined by one end of the second portion.
Public/Granted literature
- US20210222685A1 CRYOPUMP Public/Granted day:2021-07-22
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