Invention Grant
- Patent Title: Inertial measurement apparatus, electronic instrument, and moving object
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Application No.: US17081023Application Date: 2020-10-27
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Publication No.: US11333500B2Publication Date: 2022-05-17
- Inventor: Ryohei Ozawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2019-194913 20191028
- Main IPC: G01C19/5776
- IPC: G01C19/5776

Abstract:
An inertial measurement apparatus includes a first gyro sensor that has a detection axis set in the direction of a first axis, is driven at a first drive frequency, and detects angular velocity around the first axis, a second gyro sensor that has a detection axis set in the direction of a second axis, is driven at a second drive frequency, and detects angular velocity around the second axis, a third gyro sensor that has a detection axis set in the direction of a third axis, is driven at a third drive frequency, and detects angular velocity around the third axis, and a substrate on which the first, second, and third gyro sensors are provided. The natural vibration frequency of the substrate is set at a frequency that does not coincide with any of fd1, fd2, and fd3, where fd1, fd2, and fd3 represent the first, second, and third drive frequencies.
Public/Granted literature
- US20210123736A1 INERTIAL MEASUREMENT APPARATUS, ELECTRONIC INSTRUMENT, AND MOVING OBJECT Public/Granted day:2021-04-29
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