- Patent Title: Imprint apparatus, imprint method, and article manufacturing method
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Application No.: US16190588Application Date: 2018-11-14
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Publication No.: US11333969B2Publication Date: 2022-05-17
- Inventor: Keiji Yamashita , Yutaka Watanabe , Takuya Kono , Masayuki Hatano , Ikuo Yoneda
- Applicant: CANON KABUSHIKI KAISHA , CANON NANOTECHNOLOGIES, INC. , KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo; US TX Austin; JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA,CANON NANOTECHNOLOGIES, INC.,KABUSHIKI KAISHA TOSHIBA
- Current Assignee: CANON KABUSHIKI KAISHA,CANON NANOTECHNOLOGIES, INC.,KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo; US TX Austin; JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2013-146018 20130712
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
Provided is an imprint apparatus that applies a resin (drops) dispersed at a plurality of locations on a substrate, brings the resin and a mold into contact, and transfers the contoured pattern that is formed in the mold to the resin comprising: a controller that sets a principal axis direction according to the contoured pattern and an array direction in which a plurality of resin drops are aligned, and determines application positions for the resin such that the array direction is angled with respect to the principal axis direction; and a dispenser that applies the resin based on the application positions that have been determined.
Public/Granted literature
- US20190101824A1 IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2019-04-04
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