Invention Grant
- Patent Title: Ejection-material ejection device, information processing apparatus, and control method of ejection-material ejection device
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Application No.: US16847871Application Date: 2020-04-14
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Publication No.: US11333972B2Publication Date: 2022-05-17
- Inventor: Hisashi Namba , Noriyasu Hasegawa , Ken Katsuta , Nobuto Kawahara , Hideki Matsumoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JPJP2019-083711 20190425
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/175 ; G03F7/00 ; B41J29/38

Abstract:
An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.
Public/Granted literature
Information query
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