- Patent Title: Polymer, photosensitive resin composition, patterning method, method of forming cured film, interlayer insulating film, surface protective film, and electronic component
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Application No.: US16848589Application Date: 2020-04-14
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Publication No.: US11333975B2Publication Date: 2022-05-17
- Inventor: Dmitry Zubarev , Hiroyuki Urano , Katsuya Takemura , Masashi Iio , Kazuya Honda , Yoshio Kawai
- Applicant: International Business Machines Corporation , Shin-Etsu Chemical Co., Ltd.
- Applicant Address: US NY Armonk; JP Tokyo
- Assignee: International Business Machines Corporation,Shin-Etsu Chemical Co., Ltd.
- Current Assignee: International Business Machines Corporation,Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: US NY Armonk; JP Tokyo
- Agency: CanaanLaw, P.C.
- Agent Karen Canaan
- Main IPC: G03F7/023
- IPC: G03F7/023 ; C08G73/10 ; C08G73/14 ; C08G73/22 ; G03F7/022 ; G03F7/038 ; G03F7/039 ; G03F7/16 ; G03F7/20 ; G03F7/32 ; G03F7/40

Abstract:
Provided is a polymer that can be used as a base resin for a positive photosensitive resin composition and a negative photosensitive resin composition, wherein the positive photosensitive resin composition and the negative photosensitive resin composition are soluble in an aqueous alkaline solution, can form a fine pattern, can achieve high resolution, and have good mechanical properties even when they are cured at low temperature. Also provided are a positive photosensitive resin composition and a negative photosensitive resin composition using the polymer. The polymer is represented by general formulas (1) and/or (2): wherein T1 and T2 may be the same as, or different from, each other and represent any of —CO— and —SO2—; X1 is a tetravalent organic group; and l is 0 or 1; and X2 is a divalent organic group.
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