Invention Grant
- Patent Title: Exposure apparatus and article manufacturing method
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Application No.: US17324390Application Date: 2021-05-19
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Publication No.: US11335548B2Publication Date: 2022-05-17
- Inventor: Kohei Suzuki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2020-090470 20200525
- Main IPC: H01J61/52
- IPC: H01J61/52 ; G03F7/20

Abstract:
An exposure apparatus comprising a holding part for holding an electric discharge lamp, the electric discharge lamp includes an electric discharge tube which covers an electric discharge space in which a pair of electrodes are disposed to face each other, a socket provided on one end of the electric discharge tube, a metal member which guides one of the pair of electrodes into the socket, wherein an opening for ventilation is provided in a bottom of the socket, the holding part includes a ventilation pipe to form a path for ventilation through the opening in the bottom of the socket, and a cooling part for cooling the metal member by supplying a cooling medium to the metal member through the ventilation pipe.
Public/Granted literature
- US20210366702A1 EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2021-11-25
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