Invention Grant
- Patent Title: Mechanical connection for a MEMS and NEMS device for measuring a variation in pressure, and device comprising such a mechanical connection
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Application No.: US16928721Application Date: 2020-07-14
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Publication No.: US11337016B2Publication Date: 2022-05-17
- Inventor: Loïc Joet
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: BakerHostetler
- Priority: FR1908128 20190718
- Main IPC: H04R29/00
- IPC: H04R29/00 ; H04R17/02 ; H04R19/04 ; H01L41/08 ; H01H1/00 ; G05G11/00 ; G01L9/00 ; B81B3/00 ; F16C11/04

Abstract:
A mechanical connection is provided for a microelectromechanical and/or nanoelectromechanical device for measuring a variation in pressure. The device includes a fixed component extending in a main plane, a mobile component to move or deform in an out-of-plane direction under effect of a variation in pressure, and a detector of movement or deformation having at least one mobile element. The mechanical connection includes: a lever arm; a first connection connecting the mobile component to a first end of the lever arm, the first connection transmitting out-of-plane movement of the mobile component to the first end of the lever arm while allowing out-of-plane rotation of the lever arm about a direction of rotation; a second connection connected to the second end of the lever arm to allow mainly an out-of-plane rotation of the lever arm about an axis of rotation extending in the direction of rotation; a third connection connecting the lever arm to the detector at a given distance from the axis of rotation in the out-of-plane direction, the third connection being designed to convert the rotation of the lever arm about the axis of rotation into a translation in the plane of the at least one mobile element in a direction of translation.
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