- Patent Title: Pressure sensor element for measuring differential pressure and a diaphragm base having a set of diaphragms displaced by receiving pressures where a set of pressure inlet passages respectively transmit different pressures to the set of diaphragms
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Application No.: US17064059Application Date: 2020-10-06
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Publication No.: US11340128B2Publication Date: 2022-05-24
- Inventor: Tomohisa Tokuda , Masayuki Yoneda , Hirofumi Tojo , Ayumi Tsushima , Nozomi Kida
- Applicant: AZBIL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: AZBIL CORPORATION
- Current Assignee: AZBIL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-185769 20191009
- Main IPC: G01L15/00
- IPC: G01L15/00 ; G01L19/00 ; G01L19/06 ; G01L13/02
Abstract:
A sensor chip of a sensor element includes a diaphragm for measuring a differential pressure between a first pressure and a second pressure, a diaphragm for measuring an absolute pressure or a gauge pressure of the second pressure, a first pressure introduction path that transmits the first pressure to the diaphragm for measuring a differential pressure, and a second pressure introduction path that transmits the second pressure to the diaphragms. When the transmission of the first pressure or the second pressure to the diaphragms is indicated by an equivalent circuit, a path for transmitting the first pressure and a path for transmitting the second pressure are symmetrically formed.
Public/Granted literature
- US20210108980A1 SENSOR ELEMENT Public/Granted day:2021-04-15
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