Invention Grant
- Patent Title: X-ray inspection apparatus and X-ray inspection method
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Application No.: US16999970Application Date: 2020-08-21
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Publication No.: US11340176B2Publication Date: 2022-05-24
- Inventor: Akihiro Takeda
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Holland & Hart LLP
- Priority: JPJP2019-209245 20191120
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N23/10 ; G01N23/20 ; G01N23/18 ; G01N23/083

Abstract:
The X-ray inspection apparatus includes an X-ray source, a sample moving mechanism, an X-ray detector equipped with a line sensor with pixels detecting X-ray radiation passing through a sample, an image storage unit for storing X-ray radiation intensities, an intensity correction unit for correcting the X-ray radiation intensities stored in the image storage unit, and a defect detector for detecting a defect in the sample. The intensity correction unit sets an intensity of X-rays detected from the inspection initiation region after starting inspection of the sample or an intensity of X-rays preliminarily detected from the sample before starting the inspection as a reference radiation intensity, and corrects an intensity of X-rays detected from the subsequent inspection region based on a correction coefficient obtained from comparison between the intensity of X-rays detected from the subsequent inspection region and the reference radiation intensity.
Public/Granted literature
- US20210148837A1 X-RAY INSPECTION APPARATUS AND X-RAY INSPECTION METHOD Public/Granted day:2021-05-20
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