Invention Grant
- Patent Title: Semiconductor packages with die including cavities and related methods
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Application No.: US16985995Application Date: 2020-08-05
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Publication No.: US11342189B2Publication Date: 2022-05-24
- Inventor: Michael J. Seddon , Francis J. Carney , Chee Hiong Chew , Soon Wei Wang , Eiji Kurose
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Adam R. Stephenson, Ltd.
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/56 ; H01L23/31 ; H01L21/48 ; H01L23/00 ; H01L21/78 ; H01L23/12

Abstract:
Implementations of a method of forming a semiconductor package may include forming a plurality of notches into the first side of a semiconductor substrate; forming an organic material over the first side of the semiconductor substrate and into the plurality of notches; forming a cavity into each of a plurality of semiconductor die included in the semiconductor substrate; applying a backmetal into the cavity in each of the plurality of semiconductor die included in the semiconductor substrate; and singulating the semiconductor substrate through the organic material into a plurality of semiconductor packages.
Information query
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