Invention Grant
- Patent Title: Processing method and resin applying machine
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Application No.: US16925578Application Date: 2020-07-10
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Publication No.: US11342208B2Publication Date: 2022-05-24
- Inventor: Yoshikuni Migiyama , Kazuki Sugiura , Yoshinori Kakinuma , Mitsuru Ikushima
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2019-135638 20190723
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/56

Abstract:
There is provided a processing method including the steps of measuring a thickness of the wafer, holding the wafer on a holder, supplying a liquid resin to a table that faces the holder, relatively moving the holder and the table closely to each other to coat the wafer with the liquid resin, and hardening the liquid resin that has coated the wafer. In the resin applying step, a distance by which the holder and the table are to be relatively moved closely to each other to coat the wafer with the liquid resin is determined depending on the measured thickness of the wafer.
Public/Granted literature
- US20210028027A1 PROCESSING METHOD AND RESIN APPLYING MACHINE Public/Granted day:2021-01-28
Information query
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