Invention Grant
- Patent Title: Thermal management solutions for embedded integrated circuit devices
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Application No.: US16141734Application Date: 2018-09-25
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Publication No.: US11342243B2Publication Date: 2022-05-24
- Inventor: Feras Eid , Adel Elsherbini , Johanna Swan
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP.
- Main IPC: H01L23/473
- IPC: H01L23/473 ; H01L23/538 ; H01L23/427 ; H01L21/48 ; H01L23/22

Abstract:
An integrated circuit structure may be formed having a substrate, at least one integrated circuit device embedded in and electrically attached to the substrate, and a heat transfer fluid conduit extending through the substrate. In one embodiment, the heat transfer fluid conduit may be lined with a metallization within the substrate. In a further embodiment, the heat transfer fluid conduit may comprise multiple fluid channels for the removal of heat from multiple surfaces of the at least one integrated circuit device. In still a further embodiment, the substrate may include a molded layer, wherein at least one fluid channel is formed in the molded layer.
Public/Granted literature
- US20200098668A1 THERMAL MANAGEMENT SOLUTIONS FOR EMBEDDED INTEGRATED CIRCUIT DEVICES Public/Granted day:2020-03-26
Information query
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