Invention Grant
- Patent Title: Semiconductor memory device and method of manufacturing the semiconductor memory device
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Application No.: US17063236Application Date: 2020-10-05
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Publication No.: US11342262B2Publication Date: 2022-05-24
- Inventor: Jae Taek Kim , Hye Yeong Jung
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2020-0054732 20200507
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L23/535 ; H01L49/02 ; H01L27/11556 ; H01L21/768 ; H01L45/00 ; H01L27/24 ; H01L27/11582

Abstract:
The present disclosure includes a semiconductor memory device and a method of manufacturing the semiconductor memory device. The semiconductor memory device includes an insulating film passing through a dummy source structure, a first dummy stack extending to overlap the insulating film and the dummy source structure, and including a depression overlapping the insulating film, a resistive film overlapping the depression of the first dummy stack, and a second dummy stack disposed on the first dummy stack to cover the resistive film.
Public/Granted literature
- US20210351128A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-11-11
Information query
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