Invention Grant
- Patent Title: Bonding wire for semiconductor devices
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Application No.: US16067120Application Date: 2016-09-23
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Publication No.: US11342299B2Publication Date: 2022-05-24
- Inventor: Daizo Oda , Takumi Ohkabe , Teruo Haibara , Takashi Yamada , Tetsuya Oyamada , Tomohiro Uno
- Applicant: NIPPON MICROMETAL CORPORATION , NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- Applicant Address: JP Iruma; JP Tokyo
- Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- Current Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
- Current Assignee Address: JP Iruma; JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JPJP2016-090613 20160428
- International Application: PCT/JP2016/078090 WO 20160923
- International Announcement: WO2017/187653 WO 20171102
- Main IPC: H01L23/00
- IPC: H01L23/00 ; C22C5/10 ; C22C5/06

Abstract:
The present invention has as its object the provision of a bonding wire for semiconductor devices mainly comprised of Ag, in which bonding wire for semiconductor devices, the bond reliability demanded for high density mounting is secured and simultaneously a sufficient, stable bond strength is realized at a ball bond, no neck damage occurs even in a low loop, the leaning characteristic is excellent, and the FAB shape is excellent. To solve this problem, the bonding wire for semiconductor devices according to the present invention contains one or more of Be, B, P, Ca, Y, La, and Ce in a total of 0.031 at % to obtain a 0.180 at %, further contains one or more of In, Ga, and Cd in a total of 0.05 at % to 5.00 at %, and has a balance of Ag and unavoidable impurities. Due to this, it is possible to obtain a bonding wire for semiconductor devices sufficiently forming an intermetallic compound layer at a ball bond interface to secure the bond strength of the ball bond, not causing neck damage even in a low loop, having a good leaning characteristic, and having a good FAB shape.
Public/Granted literature
- US20180374816A1 BONDING WIRE FOR SEMICONDUCTOR DEVICES Public/Granted day:2018-12-27
Information query
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