Rigid-flexible coupling high-accuracy galvo scanning motor and control method thereof
Abstract:
A rigid-flexible coupling high-accuracy galvo scanning motor comprises: a stator, a rotor rotating relative to the stator, bearing seats and at least two groups of encoders. The rigid-flexible coupling bearings are installed on the rotating shaft of the rotor; each of the rigid-flexible coupling bearings comprises: a rigid bearing and a flexible hinge ring which is elastically deformable, and the flexible hinge ring is fixed in an inner ring of the rigid bearing; the at least two groups of encoders comprise: a first group of encoders and a second group of encoders; the first group of encoders is used to measure a rotation angle of the rotating shaft; and the second group of encoders is used to measure a rotation angle of the inner ring of the rigid bearing. A friction dead zone is avoided through the elastic deformation of the flexible hinge ring, thereby reducing a disturbance bandwidth.
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