Invention Grant
- Patent Title: Multi-zone pedestal heater without vias
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Application No.: US16196820Application Date: 2018-11-20
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Publication No.: US11343879B2Publication Date: 2022-05-24
- Inventor: Kevin Ptasienski , Stanton Hopkins Breitlow , Mohammad Nosrati , Kevin Smith , Brittany Phillips , Ken Ames , Patrick Margavio , Kurt English
- Applicant: Watlow Electric Manufacturing Company
- Applicant Address: US MO St. Louis
- Assignee: Watlow Electric Manufacturing Company
- Current Assignee: Watlow Electric Manufacturing Company
- Current Assignee Address: US MO St. Louis
- Agency: Burris Law, PLLC
- Main IPC: H05B3/28
- IPC: H05B3/28 ; H05B3/06 ; H01L23/48 ; H01L23/52 ; F27B5/14 ; H05B1/02 ; H01L21/67 ; H01L23/522 ; H01L23/485 ; C23C16/458 ; H01L21/687

Abstract:
A support pedestal is provided that includes a substrate having a top resistive layer defining a first set of zones and a bottom resistive layer defining a second set of zones. Each zone of the first and second set of zones is coupled to at least two electric terminals from among a plurality of electric terminals, and a total number of electric terminals is less than or equal to a total of the first and second set of zones.
Public/Granted literature
- US20190153598A1 MULTI-ZONE PEDESTAL HEATER WITHOUT VIAS Public/Granted day:2019-05-23
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