Invention Grant
- Patent Title: Apparatus for tuning discharge performance in a laser chamber
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Application No.: US16962434Application Date: 2018-12-17
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Publication No.: US11349273B2Publication Date: 2022-05-31
- Inventor: Edward Siqi Luo , Richard Carl Ujazdowski , Shuang Xu
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- International Application: PCT/US2018/065959 WO 20181217
- International Announcement: WO2019/143433 WO 20190725
- Main IPC: H01S3/22
- IPC: H01S3/22 ; H01S3/038 ; H01S3/032 ; H01S3/097 ; H01S3/106 ; H01S3/225 ; H01S3/08

Abstract:
Disclosed is a laser discharge chamber in which useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components within the chamber such as electrodes, current returns, and capacitors, and selective electrical isolation of portions of the components.
Public/Granted literature
- US20210066880A1 APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN A LASER CHAMBER Public/Granted day:2021-03-04
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