Invention Grant
- Patent Title: Drawing apparatus and control method thereof
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Application No.: US16167910Application Date: 2018-10-23
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Publication No.: US11352694B2Publication Date: 2022-06-07
- Inventor: Satoshi Nakahashi , Kaoru Tsuruta
- Applicant: NUFLARE TECHNOLOGY, INC.
- Applicant Address: JP Yokohama
- Assignee: NUFLARE TECHNOLOGY, INC.
- Current Assignee: NUFLARE TECHNOLOGY, INC.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2017-208463 20171027
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/44 ; H01J37/317 ; H01J37/20 ; H01J37/21 ; H01J37/02

Abstract:
A drawing apparatus includes: a drawing part; a cleaning-gas generator; a first valve between the cleaning-gas generator and the drawing part and adjusting a supply amount of gas to the drawing part; a first pressure gauge measuring a pressure in the drawing part; a compensation-gas introducing part introducing compensation-gas to be supplied between the cleaning-gas generator and the first valve; a second valve between the compensation-gas introducing part and the first valve and adjusting a supply amount of the compensation-gas; and a valve controller controlling the first and second valves, wherein the valve controller controls the first valve to supply the cleaning-gas at a predetermined flow rate to the drawing part and controls the second valve to cause a pressure in the drawing part to be a predetermined pressure when the first pressure gauge detects a pressure reduction due to a reduction in a supply flow rate of the cleaning-gas.
Public/Granted literature
- US20190127847A1 DRAWING APPARATUS AND CONTROL METHOD THEREOF Public/Granted day:2019-05-02
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