Invention Grant
- Patent Title: Heat shield structure for single crystal production furnace and single crystal production furnace
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Application No.: US17139975Application Date: 2020-12-31
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Publication No.: US11352713B2Publication Date: 2022-06-07
- Inventor: Zhongying Xue , Tao Wei , Xing Wei , Zhan Li , Yun Liu , Minghao Li
- Applicant: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences , Zing Semiconductor Corporation
- Applicant Address: CN Shanghai; CN Shanghai
- Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Zing Semiconductor Corporation
- Current Assignee: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences,Zing Semiconductor Corporation
- Current Assignee Address: CN Shanghai; CN Shanghai
- Priority: CN202010621640.X 20200701
- Main IPC: C30B15/14
- IPC: C30B15/14 ; C30B15/10 ; C30B29/06

Abstract:
Disclosed a heat shield structure for a single crystal production furnace, which is provided above a melt crucible of a single crystal production furnace and comprises an outer housing and a heat insulation plate disposed within the outer housing. A bottom outer surface of the outer housing faces an interior of the melt crucible, and an angle formed between a plane in which the heat insulation plate is located and a plane in which a bottom of the outer housing is located is an acute angle and faces an outer surface of single crystal silicon. The heat shield design is changed, a heat absorbing plate is additionally provided for transferring heat absorbed to the single crystal silicon, a heat channel is formed in the heat shield, so that a pulling rate is controlled, which improves radial mass uniformity of the single crystal silicon.
Public/Granted literature
- US20220002898A1 HEAT SHIELD STRUCTURE FOR SINGLE CRYSTAL PRODUCTION FURNACE AND SINGLE CRYSTAL PRODUCTION FURNACE Public/Granted day:2022-01-06
Information query
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