Invention Grant
- Patent Title: Apparatus and methods for self-correcting pressure based mass flow controller
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Application No.: US16334316Application Date: 2017-09-19
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Publication No.: US11353352B2Publication Date: 2022-06-07
- Inventor: Bhushan Somani , Christophe Ellec , Eric J. Redemann
- Applicant: Flow Devices and Systems Inc.
- Applicant Address: US CA Yorba Linda
- Assignee: Flow Devices and Systems Inc.
- Current Assignee: Flow Devices and Systems Inc.
- Current Assignee Address: US CA Yorba Linda
- Agency: Mahesh Law Group PC
- Agent Kumar Maheshwari
- International Application: PCT/US2017/052338 WO 20170919
- International Announcement: WO2018/053538 WO 20180322
- Main IPC: G05D7/06
- IPC: G05D7/06 ; G01F15/02 ; G01F1/50 ; G01F15/14 ; G01F1/42 ; G01F15/00 ; G01F25/17 ; G01F1/40 ; G01F1/48 ; G01F1/692 ; G01F1/88

Abstract:
A self-correcting pressure-based mass flow control apparatus includes outlet pressure sensing to enable correction for non-ideal operating conditions. Further the mass flow control apparatus having a fluid pathway, a shutoff valve in the fluid pathway, a reference volume in the fluid pathway, a first pressure measuring sensor in fluid communication with the reference volume, a first temperature measuring sensor providing a temperature signal indicative of the fluid temperature within the reference volume, a proportional valve in the fluid pathway, and a second pressure measuring sensor in fluid communication with the fluid pathway.
Public/Granted literature
- US20190204128A1 Apparatus and Methods for Self-Correcting Pressure Based Mass Flow Controller Public/Granted day:2019-07-04
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