Invention Grant
- Patent Title: Displacement detection type force sensor
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Application No.: US16407741Application Date: 2019-05-09
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Publication No.: US11353372B2Publication Date: 2022-06-07
- Inventor: Takahiro Iwatake , Shunichi Odaka
- Applicant: Fanuc Corporation
- Applicant Address: JP Yamanashi
- Assignee: Fanuc Corporation
- Current Assignee: Fanuc Corporation
- Current Assignee Address: JP Yamanashi
- Agency: RatnerPrestia
- Priority: JPJP2018-101480 20180528
- Main IPC: G01L1/14
- IPC: G01L1/14 ; H05K1/18

Abstract:
A displacement detection type force sensor, having a mechanism for relaxing deformation of a member due to a factor other than an external force. The force sensor has at least one of: a first relaxation part elastically deformable along a plane perpendicular to a first axis, and provided to at least one of a first substrate part, a first connection part, a second substrate part and a second connection part; and a second relaxation part elastically deformable along the first axis, and provided to at least one of the second substrate part, the second connection part, a third substrate part and a third connection part.
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