Invention Grant
- Patent Title: Optical waveguide, optical concentration measuring device, and method for manufacturing optical waveguide
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Application No.: US16493135Application Date: 2018-01-25
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Publication No.: US11353399B2Publication Date: 2022-06-07
- Inventor: Toshiro Sakamoto , Takaaki Furuya
- Applicant: ASAHI KASEI MICRODEVICES CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ASAHI KASEI MICRODEVICES CORPORATION
- Current Assignee: ASAHI KASEI MICRODEVICES CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JPJP2017-068957 20170330
- International Application: PCT/JP2018/002281 WO 20180125
- International Announcement: WO2018/179752 WO 20181004
- Main IPC: G02B6/42
- IPC: G02B6/42 ; G01N21/47 ; G02F1/295 ; G02B6/125 ; G01N21/552 ; G01N21/3504

Abstract:
It is an object of this invention to provide an optical waveguide, an optical concentration measuring device, and a method for manufacturing an optical waveguide capable of achieving an improvement of evanescent wave exuding efficiency of propagating light and light extraction efficiency. A core layer provided in an optical waveguide has a first portion having a first film thickness, a second portion having a second film thickness different from the first film thickness, and a third portion connecting the first portion and the second portion. The third portion is formed so that the film thickness is gradually increased from the second portion having the smaller film thickness toward the first portion having the larger film thickness between the first portion and the second portion, and the maximum inclination angle is 10° or more and 45° or less.
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