Invention Grant
- Patent Title: BAW sensor device with peel-resistant wall structure
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Application No.: US16408879Application Date: 2019-05-10
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Publication No.: US11353428B2Publication Date: 2022-06-07
- Inventor: Rio Rivas , Vincent K. Gustafson
- Applicant: QORVO US, INC.
- Applicant Address: US NC Greensboro
- Assignee: QORVO US, INC.
- Current Assignee: QORVO US, INC.
- Current Assignee Address: US NC Greensboro
- Agency: Haynes and Boone, LLP
- Main IPC: G01N29/02
- IPC: G01N29/02 ; G01N29/22 ; G01N29/032 ; G01N29/036 ; H03H9/10 ; H03H9/02 ; H03H9/17

Abstract:
Lateral boundaries of a fluidic passage of a fluidic device incorporating at least one BAW resonator structure are fabricated with photosensitive materials (e.g., photo definable epoxy, solder mask resist, or other photoresist), allowing for high aspect ratio, precisely dimensioned walls. Resistance to delamination and peeling between a wall structure and a base structure is enhanced by providing a wall structure that includes a thin footer portion having a width that exceeds a width of an upper wall portion extending upward from the footer portion, and/or by providing a wall structure arranged over at least one anchoring region of a base structure. Anchoring features may include recesses and/or protrusions.
Public/Granted literature
- US20190265197A1 BAW SENSOR DEVICE WITH PEEL-RESISTANT WALL STRUCTURE Public/Granted day:2019-08-29
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