Invention Grant
- Patent Title: Microelectromechanical mirror device with piezoelectric actuation, having an improved structure
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Application No.: US17121961Application Date: 2020-12-15
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Publication No.: US11353694B2Publication Date: 2022-06-07
- Inventor: Nicolo' Boni , Roberto Carminati , Massimiliano Merli
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Crowe & Dunlevy
- Priority: IT102019000024469 20191218
- Main IPC: G03B21/28
- IPC: G03B21/28 ; G02B26/08 ; B81B3/00 ; G02B26/10 ; G03B21/00

Abstract:
A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.
Public/Granted literature
- US20210191107A1 MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION, HAVING AN IMPROVED STRUCTURE Public/Granted day:2021-06-24
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